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Boron nitride ... -
Zirconia ceram... -
Ceramic ball -
99 alumina cer...
Suzhou Kaifa New Material Technology Co., Ltd.
Email：heqing@szkfxc.com
Email：sales@szbknm.com
Email：bkxc.bonnie@gmail.com
Pbn-pg composite heater
Email：beikenano@gmail.com
Email：beikenano@gmail.com
一、产品概述
1、 Product overview
热解氮化硼-热解石墨（PBN-PG）复合加热器是使用高绝缘性的PBN作为基材，在低压（10torr 以下）高温下，用低压热分解CVD法进行导电PG涂层的加热器。
The pyrolytic boron nitride pyrolytic graphite (pbn-pg) composite heater is a kind of heater which uses PBN with high insulation as the base material and uses low-pressure thermal decomposition CVD method to conduct conductive PG coating under low-pressure (below 10 Torr) and high temperature.
二、主要特点
2、 Main features
1、PBN、PG化学性质稳定；
1. The chemical properties of PBN and PG were stable;
2、耐酸碱腐蚀；
2. Acid and alkali corrosion resistance;
3、可以做成复杂的形状；
3. Can be made into complex shape;
4、可以急速升温至1500℃（不活性气氛中，真空下）；
4. It can be rapidly heated to 1500 ℃ (in inactive atmosphere, under vacuum);
5、超高纯度；
5. Ultra high purity;
6、释放出的气体少，可以应对超高真空。
6. Less gas is released, which can deal with ultra-high vacuum.
三、产品应用
3、 Product application
1、半导体基体加热（应用于MBE、MOCVD、溅射镀膜、CVC等领域）；
1. Heating of semiconductor substrate (used in MBE, MOCVD, sputtering coating, CVC and other fields);
2、超导体基体加热。；
2. Heating of superconductor matrix. ;
3、电子显微镜样品加热；
3. Electron microscope sample heating;
4、金属蒸发加热源。
4. Metal evaporation heating source.
四、主要参数
|
|
PBN |
PG |
|
最高温度 |
2400℃ |
3600℃ |
|
张力 R.T. |
410kg/cm2 |
1050kg/cm2 |
|
2200℃ |
1030kg/cm2 |
1400kg/cm2 |
|
电阻（1000℃）”a” |
3*107Ω.cm |
4*10-4Ω.cm |
|
”c” |
3*109Ω.cm |
1*10-1Ω.cm |
一般加热器参数
圆形
|
图形 |
尺寸 |
电阻 |
电压 |
电流 （A） |
最大功率 |
平整度 |
温度均匀性 （℃） |
|
圆形
|
25.4 |
10-16 |
40 |
8 |
300 |
1/100 |
＜1% |
|
38.1 |
10-16 |
70 |
10 |
700 |
1/100 |
＜1% |
|
|
50.8 |
15-25 |
110 |
15 |
1300 |
1/100 |
＜1% |
|
|
63.5 |
22-35 |
180 |
15 |
2000 |
1/100 |
＜1% |
|
|
76.2 |
22-35 |
208 |
20 |
3000 |
1/100 |
＜1% |
|
|
长条形 |
50.8 |
15-25 |
110 |
12 |
1300 |
1/100 |
＜1% |
|
76.2 |
15-25 |
170 |
20 |
3000 |
1/100 |
＜1% |
|
|
101.6 |
15-25 |
208 |
25 |
4500 |
1/100 |
＜1% |
圆形带耳朵
|
图形 |
尺寸 |
电阻 |
电压 |
电流 |
最大功率 |
平整度 |
温度均匀性 |
|
圆形 |
12.7 |
5-7 |
15 |
8 |
80 |
1/100 |
＜1% |
|
19 |
9-15 |
30 |
8 |
150 |
1/100 |
＜1% |
|
|
25.4 |
9-15 |
40 |
10 |
300 |
1/100 |
＜1% |
|
|
44.4 |
17-30 |
110 |
12 |
1000 |
1/100 |
＜1% |
|
|
50.8 |
15-25 |
110 |
15 |
1300 |
1/100 |
＜1% |
|
|
条形 |
25.4 |
15-25 |
50 |
8 |
300 |
1/100 |
＜1% |
Warm tips: Kaifa products are only used for scientific research, not for human body,different batches of products have different specifications and performance.The website pictures are from the Internet. The pictures are for reference only. Please take the real object as the standard. In case of infringement, please contact us to delete them immediately.
Quality AssuranceHigh standards of the industry-leading
|
Ceramic tube Thermocouple protection tube |
|
Ceramic rod Ceramic shaft sleeve insulated |
|
Ceramic crucible High quality and high temperature resistant |
|
T-shaped concave convex tube High temperature insulator porcelain mouth porcelain |
|
Ceramic plate Alumina plate, ceramic plate, bearing plate, |
|
Ceramic gasket High temperature resistant ceramic ring, |
|
Screw nut Insulating screws, corrosion-resistant bolts, |
|
Ceramic ball Alumina and zirconia ultrafine grinding media. |
